Compensation of the Parasitic Capacitance of a Scanning Force Microscope Cantilever Used for Measurements on Ferroelectric Capacitors of Submicron Size by Means of Finite Element Simulations / Prume, Klaus ; Roelofs, Andreas ; Schmitz, Thorsten ; Reichenb
| Author: | Klaus Prume, Andreas Roelofs, Thorsten Schmitz, Bernd Reichenberg |
|---|---|
| ISBN: | 0021-4922 |
| Parent Title (English): | Japanese Journal of Applied Physics. 41 (2002), H. 11B |
| Document Type: | Article |
| Language: | English |
| Year of Completion: | 2002 |
| Date of the Publication (Server): | 2012/12/18 |
| First Page: | 7198 |
| Last Page: | 7201 |
| Link: | http://dx.doi.org/10.1143/JJAP.41.7198 |
| Zugriffsart: | bezahl |
| Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |
