- A calorimetric gas sensor is presented for the monitoring of gas-phase H2O2 at elevated temperature during sterilization processes in aseptic food industry. The sensor consists of two temperature-sensitive thin-film resistances built up on a polyimide foil with a thickness of 25 μm, which are passivated with a layer of SU-8 photo resist and catalytically activated with manganese(IV) oxide. Instead of an active heating structure, the calorimetric sensor utilizes the elevated temperature of an evaporated H2O2 aerosol. In an experimental set-up, the sensor has shown a sensitivity of 4.78 °C/(%v/v) in a H2O2 concentration range of 0 to 10% v/v at an evaporation temperature of 240 ∘C. Furthermore, the sensor possesses the same, unchanged sensor signal even at varied evaporation temperatures of the gas stream. The sensor characterization demonstrates the suitability of the calorimetric gas sensor for monitoring the efficiency of sterilization processes.
