Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies
Author: | Michael Josef SchöningORCiD, Niko Näther, V. Auger, Arshak PoghossianORCiD, M. Koudelka-Hep |
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ISBN: | 0925-4005 |
Parent Title (English): | Sensors and Actuators B. 108 (2005), H. 1-2 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2005 |
First Page: | 986 |
Last Page: | 992 |
Note: | Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004 |
Link: | http://dx.doi.org/10.1016/j.snb.2004.12.029 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien |