Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films / Gerber, P. ; Roelofs, A. ; Kügeler, C.; Böttger, U. ; Waser, R. ; Prume, K. ;
Author: | Klaus Prume, P. Gerber, A. Roelofs, C. Kügeler |
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ISBN: | 0021-8979 |
Parent Title (English): | Journal of Applied Physics . 96 (2004), H. 5 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2004 |
Date of the Publication (Server): | 2012/12/18 |
First Page: | 2800 |
Last Page: | 2804 |
Link: | http://dx.doi.org/10.1063/1.1775306 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |