Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;
Author: | Klaus Prume, P. Muralt, F. Calame, T. Schmitz-Kempen |
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ISBN: | 0885-3010 |
Parent Title (English): | IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2007 |
Date of the Publication (Server): | 2012/12/18 |
First Page: | 81 |
Last Page: | 14 |
Link: | http://dx.doi.org/10.1109/TUFFC.2007.206 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |