Fabrication of GaAs symmetric pyramidal mesas prepared by wet-chemical etching using AlAs interlayer. Kicin, S.; Cambel, V.; Kuliffayova, M.; Gregusova, D.; Kovacova, E.; Novak, J.; Kostic, I.; Forster, A.
Author: | Arnold Förster, S Kicin, V. Cambel, M. Kuliffayova |
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ISBN: | 1089-7550 |
Parent Title (English): | Journal of Applied Physics. 91 (2002), H. 2 |
Document Type: | Article |
Language: | English |
Year of Completion: | 2002 |
First Page: | 878 |
Last Page: | 880 |
Link: | http://dx.doi.org/10.1063/1.1421626 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Energietechnik |