Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application / Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.;
Author: | Klaus Prume |
---|---|
Document Type: | Article |
Language: | English |
Year of Completion: | 2007 |
First Page: | 702 |
Note: | ISAF 2007. Sixteenth IEEE International Symposium on Applications of Ferroelectrics, 2007 |
Link: | http://dx.doi.org/10.1109/ISAF.2007.4393376 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |