pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique
- pH-sensitive properties of barium strontium titanate (BST) high-k thin films as alternative gate material for field-effect capacitive (bio-)chemical sensors based on an electrolyte-insulator-semiconductor system have been investigated. The BST films of different compositions (Ba0.31Sr0.69TiO3, Ba0.25Sr0.75TiO3 and Mg-doped Ba0.8Sr0.2Mg0.1Ti0.9O3) were deposited by pulsed laser deposition technique from targets fabricated by self-propagating high-temperature synthesis. The realised sensors have been electrochemically characterised by means of impedance-spectroscopy, capacitance–voltage and constant-capacitance method. The sensors possess a Nernstian-like pH sensitivity in the concentration range between pH 3 and 11 with a response time of 5–10 s. An equivalent circuit model for the BST-based capacitive field-effect sensor is discussed.
Author: | Vahe Vazgen BuniatyanORCiD, Maryam H. Abouzar, Norayr W. Martirosyan, Jürgen Schubert, Spartak Gevorgian, Michael Josef SchöningORCiD, Arshak PoghossianORCiD |
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DOI: | https://doi.org/10.1002/pssa.200983310 |
ISSN: | 1862-6300 |
Parent Title (English): | Physica Status Solidi (A) |
Publisher: | Wiley-VCH |
Place of publication: | Berlin |
Document Type: | Article |
Language: | English |
Year of Completion: | 2010 |
Volume: | 207 |
Issue: | 4 |
First Page: | 824 |
Last Page: | 830 |
Note: | Special Issue: Engineering of Functional Interfaces EnFI 2009 |
Link: | https://doi.org/10.1002/pssa.200983310 |
Zugriffsart: | campus |
Institutes: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
FH Aachen / INB - Institut für Nano- und Biotechnologien | |
collections: | Verlag / Wiley-VCH |