Compensation of the Parasitic Capacitance of a Scanning Force Microscope Cantilever Used for Measurements on Ferroelectric Capacitors of Submicron Size by Means of Finite Element Simulations / Prume, Klaus ; Roelofs, Andreas ; Schmitz, Thorsten ; Reichenb
Author: | Klaus Prume, Andreas Roelofs, Thorsten Schmitz, Bernd Reichenberg |
---|---|
ISBN: | 0021-4922 |
Parent Title (English): | Japanese Journal of Applied Physics. 41 (2002), H. 11B |
Document Type: | Article |
Language: | English |
Year of Completion: | 2002 |
First Page: | 7198 |
Last Page: | 7201 |
Link: | http://dx.doi.org/10.1143/JJAP.41.7198 |
Zugriffsart: | bezahl |
Institutes: | FH Aachen / Fachbereich Elektrotechnik und Informationstechnik |