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Prume, Klaus
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Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size / Prume, K. ; Gerber, P. ; Kügeler, C. ; Roelofs, A. ; Böttger, U. ; Waser, R. ; Schmitz-Kempen,
(2004)
Prume, Klaus
;
Gerber, Peter
;
Kügeler, Carsten
;
Roelofs, Andreas
Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.
(2007)
Prume, Klaus
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Raeder, H.
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Tyholdt, F.
;
Booij, W. E.
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