Conference Proceeding
Refine
Year of publication
Document Type
- Conference Proceeding (18) (remove)
Language
- English (18) (remove)
Keywords
- Biosensor (2)
- Biosensorik (1)
- ISFET (1)
- Nanostructuring (1)
- Tobacco mosaic virus (1)
- Wafer (1)
- acetoin (1)
- capacitive field-effect biosensor (1)
- capillary micro-droplet cell (1)
- enzyme immobilization (1)
- layer expansion (1)
- pattern-size reduction (1)
- self-aligned patterning (1)
- wafer-level testing (1)
Institute
- INB - Institut für Nano- und Biotechnologien (18) (remove)
DNA-hybridization detection using light-addressable potentiometric sensor modified with gold layer
(2014)
Multi-parameter detection for supporting monitoring and control of biogas processes in agriculture
(2014)
An application of a scanning light-addressable potentiometric sensor for label-free DNA detection
(2013)
A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.