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Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.
Rezension zu: K. Zimmermann, Technische Mechanik – multimedial. Fachbuch Verlag Leipzig (2000)
(2002)
Structural design analyses are conducted with the aim of verifying the exclusion of ratcheting. To this end it is important to make a clear distinction between the shakedown range and the ratcheting range. In cyclic plasticity more sophisticated hardening models have been suggested in order to model the strain evolution observed in ratcheting experiments. The hardening models used in shakedown analysis are comparatively simple. It is shown that shakedown analysis can make quite stable predictions of admissible load ranges despite the simplicity of the underlying hardening models. A linear and a nonlinear kinematic hardening model of two-surface plasticity are compared in material shakedown analysis. Both give identical or similar shakedown ranges. Structural shakedown analyses show that the loading may have a more pronounced effect than the hardening model.