Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
- A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.
| Verfasserangaben: | Arshak PoghossianORCiD, Kerstin Schumacher, Joachim P. Kloock, Christian Rosenkranz, Joachim W. Schultze, Mattea Müller-Veggian, Michael Josef SchöningORCiD |
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| URN: | urn:nbn:de:hbz:a96-opus-1259 |
| DOI: | https://doi.org/10.21269/104 |
| Dokumentart: | Konferenzveröffentlichung |
| Sprache: | Englisch |
| Erscheinungsjahr: | 2006 |
| Veröffentlichende Institution: | Fachhochschule Aachen |
| Beteiligte Körperschaft: | International Symposium on Sensor Science, I3S 2005 <3; 2005; Juelich, Germany> |
| Datum der Publikation (Server): | 05.04.2006 |
| Freies Schlagwort / Tag: | Biosensorik; ISFET; Wafer ISFET; capillary micro-droplet cell; wafer-level testing |
| GND-Schlagwort: | Biosensor |
| Quelle: | http://www.mdpi.org/sensors/papers/s6040397.pdf |
| Fachbereiche und Einrichtungen: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
| FH Aachen / INB - Institut für Nano- und Biotechnologien | |
| DDC-Klassifikation: | 5 Naturwissenschaften und Mathematik / 57 Biowissenschaften; Biologie / 570 Biowissenschaften; Biologie |
| collections: | FH Aachen / International Symposium on Sensor Science, I3S 2005 <3; 2005; Ju |
