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The Virtual Cleanroom – a new tool in teaching MST process technologies

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Author:Klaus-Peter Kämper, Antoni Picard, Manfred Brill, Detlef (u.a.) Cassel
Parent Title (English):mst news International newsletter on micro - nano Integration (2003)
Document Type:Article
Year of Completion:2003
Date of the Publication (Server):2012/12/18
First Page:35
Last Page:36
Institutes:FH Aachen / Fachbereich Maschinenbau und Mechatronik