Multi-parameter sensing using high-k oxide of barium strontium titanate
- High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors. In this work, a Si-based sensor chip containing Pt interdigitated electrodes covered with a thin BST layer (485 nm) has been developed for multi-parameter chemical sensing. The chip has been applied for the contactless measurement of the electrolyte conductivity, the detection of adsorbed charged macromolecules (positively charged polyelectrolytes of polyethylenimine) and the concentration of hydrogen peroxide (H2O2) vapor. The experimental results of functional testing of individual sensors are presented. The mechanism of the BST sensitivity to charged polyelectrolytes and H2O2 vapor has been proposed and discussed.
| Verfasserangaben: | Christina Huck, Arshak PoghossianORCiD, Matthias Bäcker, Steffen Reisert, Friederike Kramer, Vardges K. Begoyan, Vahe V. Buniatyan, Michael Josef SchöningORCiD |
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| DOI: | https://doi.org/10.1002/pssa.201431911 |
| ISSN: | 1862-6319 |
| Titel des übergeordneten Werkes (Englisch): | Physica status solidi (a) |
| Verlag: | Wiley |
| Verlagsort: | Weinheim |
| Dokumentart: | Wissenschaftlicher Artikel |
| Sprache: | Englisch |
| Erscheinungsjahr: | 2015 |
| Datum der Publikation (Server): | 23.03.2015 |
| Jahrgang: | 212 |
| Ausgabe / Heft: | 6 |
| Umfang: | 1254 |
| Erste Seite: | 1259 |
| Link: | https://doi.org/10.1002/pssa.201431911 |
| Fachbereiche und Einrichtungen: | FH Aachen / Fachbereich Medizintechnik und Technomathematik |
| FH Aachen / INB - Institut für Nano- und Biotechnologien | |
| collections: | Verlag / Wiley |
